Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology

✍ Scribed by Feng Cui; Wenyuan Chen; Weiping Zhang; Qijun Xiao; Gaoyin Ma; Wu Liu

• Book ID: 106185796
• Publisher: Springer-Verlag
• Year: 2009
• Tongue: English
• Weight: 635 KB
• Volume: 15
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-009-0924-0