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Design and Fabrication of AlGaN-Based Resonant-Cavity-Enhanced p-i-n UV PDs

โœ Scribed by Chao Nie; Ruo Lian Jiang; Xiao Li Ji; Zi Li Xie; Bin Liu; Ping Han; Rong Zhang; You Dou Zheng


Book ID
117883627
Publisher
IEEE
Year
2009
Tongue
English
Weight
572 KB
Volume
45
Category
Article
ISSN
0018-9197

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AlGaN-based resonant cavity-enhanced ultraviolet metal-semiconductor-metal photodetectors (PDs) were grown on sapphire substrates without metalorganic chemical vapor deposition (MOCVD)-grown GaN templates by radio frequency plasma-assisted molecular beam epitaxy (RF-MBE). In the resonant cavity-enha