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Design and fabrication of a polarization-independent wideband transmission fused-silica grating

✍ Scribed by Cao, Hongchao ;Zhou, Changhe ;Feng, Jijun ;Lu, Peng ;Ma, Jianyong


Book ID
115355246
Publisher
The Optical Society
Year
2010
Tongue
English
Weight
698 KB
Volume
49
Category
Article
ISSN
1559-128X

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## Abstract A simple and cost‐effective method to manufacture a phase mask with high diffraction efficiency for deep UV application is proposed. The deep rectangular grating fabricated by using laser interference is etched directly into a fused silica substrate, instead of the dielectric coating on