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Design and characterization of high-voltage NMOS and PMOS devices in standard 0.25 μm CMOS technology

✍ Scribed by Xiaoliang Han; Chihao Xu


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
281 KB
Volume
38
Category
Article
ISSN
0026-2692

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✦ Synopsis


This paper presents the design of high-voltage NMOS and PMOS devices with shallow trench isolation (STI) in standard 0.25 mm/5 V CMOS technology. Breakdown voltages of 20 V for n-channel device with a specific on resistance of 1.06 mO cm 2 and À20 V for p-channel device with a specific on resistance of 2.83 mO cm 2 have been achieved without any modification of existing standard CMOS process.


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