Design and characterization of high-voltage NMOS and PMOS devices in standard 0.25 μm CMOS technology
✍ Scribed by Xiaoliang Han; Chihao Xu
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 281 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0026-2692
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✦ Synopsis
This paper presents the design of high-voltage NMOS and PMOS devices with shallow trench isolation (STI) in standard 0.25 mm/5 V CMOS technology. Breakdown voltages of 20 V for n-channel device with a specific on resistance of 1.06 mO cm 2 and À20 V for p-channel device with a specific on resistance of 2.83 mO cm 2 have been achieved without any modification of existing standard CMOS process.
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