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Depth resolved stress investigations of c-BN thin films

✍ Scribed by Klett, A.; Freudenstein, R.; Plass, M.F.; Kulisch, W.


Book ID
122658380
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
147 KB
Volume
10
Category
Article
ISSN
0925-9635

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