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Depth resolved comparative investigation of phase formation and stress build-up in cubic boron nitride films

✍ Scribed by A Klett; R Freudenstein; W Kulisch; M Ye; M.P Delplancke-Ogletree


Book ID
117226637
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
265 KB
Volume
398-399
Category
Article
ISSN
0040-6090

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