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Depth-resolved analysis in multi-layered glass and metal materials using laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS)

โœ Scribed by Mason, Paul R. D.; Mank, Arjan J. G.


Book ID
121348616
Publisher
Royal Society of Chemistry
Year
2001
Tongue
English
Weight
299 KB
Volume
16
Category
Article
ISSN
0267-9477

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Laser ablation inductively coupled plasma mass spectrometry LA-ICP-MS was used for profiling patterned thin metal layers on a polymerrsilicon substrate. The parameters of the laser and ICP-MS operating conditions have been studied and optimized for this purpose. A new laser ablation chamber was desi