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Depth Profiling of Phosphorus in Photonic-Grade Silicon Using Laser-Induced Breakdown Spectrometry

✍ Scribed by Milan, M.; Lucena, P.; Cabalin, L. M.; Laserna, J. J.

Book ID: 115363363
Publisher: Society for Applied Spectroscopy
Year: 1998
Tongue: English
Weight: 231 KB
Volume: 52
Category: Article
ISSN: 0003-7028
DOI: 10.1366/0003702981943662

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