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Depth profiling of oxygen in amorphous germanium films by secondary ion mass spectrometry

โœ Scribed by N.G. Nakhodkin; A.F. Bardamid; A.I. Shaldervan; S.P. Chenakin


Book ID
107862780
Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
1023 KB
Volume
65
Category
Article
ISSN
0040-6090

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Depth profile measurement by secondary i
โœ M. Moens; M. van Craen; F.C. Adams ๐Ÿ“‚ Article ๐Ÿ“… 1984 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 1022 KB

The possibilities of measuring depth profiles by secondary ion mass spectrometry are evaluated. The influence of different instrumental and experimental parameters on depth resolution in the profiles are studied: the effects of primary ion beam characteristics, reactive gas adsorption and mechanical