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Depth profiling of nitrogen implanted into Si/C and Zr/C bilayers with nuclear reaction analysis

✍ Scribed by Y Miyagawa; S Nakao; L.S Wielunski; H Hasegawa; S Miyagawa

Book ID: 114171960
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 260 KB
Volume: 161-163
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(99)00936-2

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