C and N depth profiles of SiCN layers determined with nuclear reaction analyses and AES

✍ Scribed by F Link; H Baumann; K Bethge; H Klewe-Nebenius; M Bruns

• Book ID: 114169893
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 139 KB
• Volume: 139
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(97)00976-2