Depth profiling of carbon in silicon using the 12C(p, p′γ) reaction
✍ Scribed by K. Yasuda; R. Ishigami; M. Sasase; Y. Ito
- Book ID
- 108224199
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 216 KB
- Volume
- 266
- Category
- Article
- ISSN
- 0168-583X
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📜 SIMILAR VOLUMES
Resonances at 429 keV and 897 keV in the 15 N(p, ac) 12 C reaction were investigated for depth profiling nitrogen in materials containing nitrogen isotopes in natural abundances. Both resonances exhibit identical sensitivity, however the resonance at 897 keV is prone to interferences from light elem
Nuclear reactions (d,p) are often used to perform depth profiling of light elements in solids. In particular, protons coming from 12 C(d,p 0 ) 13 C and 13 C(d,p 0 ) 14 C reactions are emitted at very different energies. Consequently these two reactions can be used to depth profile 12 C and 13 C simu