Mechanical properties of plasma polymer
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R. Trivedi; V. Cech
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Article
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2010
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Elsevier Science
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English
โ 282 KB
A plasma-polymerized tetravinylsilane film of about 1 ฮผm thickness was prepared under steady-state deposition conditions on polished silicon wafer using plasma-enhanced chemical vapor deposition. Nearsurface mechanical properties such as the reduced modulus and hardness of the plasma polymer film we