Depth profile analysis of an electrodeposited multilayer structure with non-uniform thickness distribution by glow discharge optical spectroscopy

✍ Scribed by Zdeněk Weiss

• Publisher: John Wiley and Sons
• Year: 1991
• Tongue: English
• Weight: 366 KB
• Volume: 17
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.740170905

✦ Synopsis

Abstract

An electrodeposited multiplayer structure consisting of nine alternating layers of copper and nickel was depth profiled by glow discharge emission spectroscopy using a Grimm lamp with an anode tube of internal diameter 4 mm. Depth profiled of the non‐uniform region near the sample edge are reported. Thickness inhomogeneity causes the erosion crater bottom to penetrate through individual layers obliquely, which is the reason for signal response distortion. The dependence of signal response on the thickness gradient is discussed and a formula for the thickness gradient estimation from the depth profiles is proposed.