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Depth of origin of sputtered atoms for elemental targets

✍ Scribed by V.I. Shulga; W. Eckstein

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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✍ M.H. Shapiro; E. Trovato; T.A. Tombrello 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 119 KB

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✍ G. Falcone; P. Sigmund 📂 Article 📅 1981 🏛 Springer 🌐 English ⚖ 282 KB

Transport theory of sputtering I: Depth

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On the origin of sputtered excited atoms

✍ Roger Kelly 📂 Article 📅 1982 🏛 Elsevier Science ⚖ 499 KB