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Depth of origin of atoms sputtered from crystalline targets

โœ Scribed by M.H. Shapiro; E. Trovato; T.A. Tombrello


Book ID
114164798
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
119 KB
Volume
180
Category
Article
ISSN
0168-583X

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Depth of origin of sputtered atoms
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