Depth analysis of oxygen and gold in thin film semiconductor structures using RBS, AES, SIMS and resonant scattering

✍ Scribed by H.A. Ras; R. Pretorius

• Book ID: 113279103
• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 643 KB
• Volume: 35
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(88)90317-5