๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Deposition temperature and thickness effects on the characteristics of dc-sputtered ZrNx films

โœ Scribed by Chuan-Pu Liu; Heng-Ghieh Yang

Book ID
113780828
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
163 KB
Volume
86
Category
Article
ISSN
0254-0584

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Deposition temperature effects on the ch
Deposition temperature effects on the characteristics of a-Si:H deposited by pulsed DC magnetron sputtering
โœ Cherfi, R. ;Abdelmoumene, A. ;Kechouane, M. ;Rahal, A. ;Aoucher, M. ;Mohammed-Br ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 637 KB

## Abstract In this study, the deposition temperature effects on the properties of hydrogenated amorphous silicon films are reported. The aโ€Si:H thin films were deposited by DC magnetron sputtering technique, according to a new protocol of deposition. This last consists of a successively several th