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Deposition of Y2O3 stabilized ZrO2 thin films from Zr(DPM)4 and Y(DPM)3 by aerosol-assisted MOCVD

✍ Scribed by Haizheng Song; Changrong Xia; Yinzhu Jiang; Guangyao Meng; Dingkun Peng

No coin nor oath required. For personal study only.

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