Deposition of (Ti, Al)N coatings by means of electron beam ion plating with evaporation of Ti and Al from two separate crucibles

✍ Scribed by J. Palmers; M. Van Stappen

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 1014 KB
• Volume: 76-77
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(95)02559-6