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Deposition of Tantalum, Tantalum Oxide, and Tantalum Nitride with Controlled Electrical Characteristics

✍ Scribed by Krikorian, E.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Interdependence of structural and electr

✍ Cacucci, Arnaud; Loffredo, Stéphane; Potin, Valérie; Imhoff, Luc; Martin, Nicola 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 527 KB

Atomic Layer Deposition and Chemical Vap

✍ Kukli, Kaupo; Ritala, Mikko; Leskelä, Markku 📂 Article 📅 2000 🏛 American Chemical Society 🌐 English ⚖ 92 KB

Electrical breakdown and electronic curr

✍ K.C. Kalra; Parveen Katyal 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 582 KB

Phase evolution of tantalum nitride and

✍ Zhongwen Li; Le Gu; Guangze Tang; Xinxin Ma; Mingren Sun; Liqin Wang 📂 Article 📅 2011 🏛 Nonferrous Metals Society of China 🌐 English ⚖ 681 KB

Synthesis and Properties of Tantalum Oxi

✍ Prof. Dr. G. Brauer; Dr. J. R. Weidlein 📂 Article 📅 1965 🏛 John Wiley and Sons 🌐 English ⚖ 139 KB 👁 2 views

Magnetron sputter deposited tantalum and

✍ Bernoulli, D.; Müller, U.; Schwarzenberger, M.; Hauert, R.; Spolenak, R. 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 562 KB