Deposition of surface layers by the LPCVD process conducted in a TiCl4+ H2atmosphere: contribution of the nitrogen contained in the steel substrate

✍ Scribed by J. Michalski; T. Wierzchoń

• Book ID: 104907299
• Publisher: Springer
• Year: 1990
• Tongue: English
• Weight: 394 KB
• Volume: 9
• Category: Article
• ISSN: 0261-8028
• DOI: 10.1007/bf00721037