✦ LIBER ✦
Effect of temperature on the formation of surface layers in plasma-assisted chemical vapour deposition processes carried out in an atmosphere containing Ti(OiC3H7)4vapours
✍ Scribed by J. R. Sobiecki; T. Wierzchon; B. Kułakowska-Pawlak; W. Żyrnicki
- Publisher
- Springer
- Year
- 1996
- Tongue
- English
- Weight
- 1002 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0261-8028
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