Deposition of stress-free diamond films on Si by diamond/β-SiC nanocomposite intermediate layers

✍ Scribed by Srikanth, Vadali V.S.S.; Staedler, Thorsten; Jiang, Xin

• Book ID: 120529939
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 565 KB
• Volume: 18
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2009.07.007