𝔖 Bobbio Scriptorium

✦ LIBER ✦

Deposition of SixC1−x: films by reactive r.f. sputtering: W Weisweiler et al, Thin Solid Films, 155, 1987, 39–51

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 301 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90314-x

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

IR transmittance studies of hydrogen-fre

IR transmittance studies of hydrogen-free and hydrogenated silicon nitride and silicon oxynitride films deposited by reactive sputtering: Dirk Schalch et al, Thin Solid Films, 155, 1987, 301–308

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 157 KB