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Deposition of polysilicon as an example of a pyrolytic CVD process

✍ Scribed by Jacek Korec

Book ID: 107789154
Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 704 KB
Volume: 49
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(80)90129-3

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