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Deposition of nano-crystalline graphite films by cathodic plasma electrolysis

✍ Scribed by T. Paulmier; J.M. Bell; P.M. Fredericks

Book ID
108289469
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
959 KB
Volume
515
Category
Article
ISSN
0040-6090

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Thin films of Zr-O/Al-O were deposited on SKD 11 tool steel substrate using Zr and Al cathodes in a cathodic arc plasma deposition system. The substrates were mounted on a rotating holder which alternatively exposed them to plasma from the two cathodes. The influence of the Zr and Al cathode arc cur