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Deposition of indium tin oxide films on polycarbonate substrates by direct metal ion beam deposition

โœ Scribed by Daeil Kim

Book ID
108418135
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
205 KB
Volume
218
Category
Article
ISSN
0169-4332

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## Abstract Indium tin oxide (ITO) films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique (IBAD) at different ion beam currents (80โ€“120 mA). The effect of the ion beam current on films properties has been studied. The films prepared at low ion

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Indium tin oxide (ITO) films were produced by low-energy oxygen ion beam assisted electron-beam evaporation. The dependence of surface morphology, electrical and optical properties on evaporation rate, oxygen ion beam energy and density, as well as substrate temperatures was characterized by atomic