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Deposition of epitaxial Ti[sub 2]AlC thin films by pulsed cathodic arc

✍ Scribed by RoseÌn, J.; Ryves, L.; Persson, P. O. AÌ.; Bilek, M. M. M.

Book ID: 120482087
Publisher: American Institute of Physics
Year: 2007
Tongue: English
Weight: 477 KB
Volume: 101
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2709571

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