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Deposition of Cubic Boron Nitride in Hydrogen Plasma

✍ Scribed by Igor Konyashin; Beverley Inkson; Joachim Bill; Fritz Aldinger; Valery Khvostov; Alexey Bregadze; Malvina Guseva; Vladimir Babaev

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 415 KB
Volume: 4
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(199807)04:04<125::aid-cvde125>3.0.co;2-z

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