Deposition of Conductive Films onto Silicon, Germanium, and SiO2 /Si Structures via Pyrolysis of Titanocene and Zirconocene Dichlorides in the Presence of Organosilicon Compounds

✍ Scribed by O. N. Mittov; N. I. Ponomareva; I. Ya. Mittova; M. N. Bezryadin

• Book ID: 110323071
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2002
• Tongue: English
• Weight: 39 KB
• Volume: 38
• Category: Article
• ISSN: 0020-1685
• DOI: 10.1023/a:1013647310115