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Deposition of conducting films on glass

Publisher
Elsevier Science
Year
1952
Tongue
English
Weight
98 KB
Volume
2
Category
Article
ISSN
0042-207X

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Thermal stability studies of atmospheric
Thermal stability studies of atmospheric plasma deposited siloxane films deposited on Vycorβ„’ glass
✍ Amsarani Ramamoorthy; Mahfujur Rahman; Damian A. Mooney; J.M. Don MacElroy; Deni πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 562 KB

The thermal stability of siloxane films deposited on Vycor glass and silicon substrates using atmospheric pressure plasma was studied. Siloxane films were deposited from a liquid tetraethyl orthosilicate (TEOS) precursor which was nebulised into a helium/oxygen plasma. The thickness of the siloxane