Structural and mechanical stability upon
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V.V. Uglov; V.M. Anishchik; S.V. Zlotski; G. Abadias; S.N. Dub
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Article
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2008
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Elsevier Science
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English
β 322 KB
Ti-Zr-N coatings were formed by the method of vacuum arc deposition using combined Ti and Zr plasma flows in a N 2 atmosphere at different ratios of arc currents of Ti and Zr cathodes. After deposition, obtained samples were annealed in vacuum at the temperature of 850 Β°C. The element and phase comp