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Deposition of and annealing effect on Ti(C, N) coatings

✍ Scribed by M. Tamura; H. Kubo


Book ID
107930123
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
433 KB
Volume
49
Category
Article
ISSN
0257-8972

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Ti-Zr-N coatings were formed by the method of vacuum arc deposition using combined Ti and Zr plasma flows in a N 2 atmosphere at different ratios of arc currents of Ti and Zr cathodes. After deposition, obtained samples were annealed in vacuum at the temperature of 850 Β°C. The element and phase comp