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Deposition of a TMDSO-Based Film by a Non-Equilibrium Atmospheric Pressure DC Plasma Jet

✍ Scribed by Deng, Xiaolong; Nikiforov, Anton Yu; De Geyter, Nathalie; Morent, Rino; Leys, Christophe


Book ID
121697832
Publisher
John Wiley and Sons
Year
2013
Tongue
English
Weight
400 KB
Volume
10
Category
Article
ISSN
1612-8850

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