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Thin film deposition by means of atmospheric pressure microplasma jet

✍ Scribed by Benedikt, J; Raballand, V; Yanguas-Gil, A; Focke, K; von Keudell, A


Book ID
124073327
Publisher
Institute of Physics
Year
2007
Tongue
English
Weight
319 KB
Volume
49
Category
Article
ISSN
0741-3335

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