✦ LIBER ✦

Deposition Efficiency Reducing Reactions in Silicon Deposition from Silane at Low Pressure

✍ Scribed by Dr. H. Kühne

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The deposition of silicon from silane in

✍ W.A.P. Claassen; J. Bloem; W.G.J.N. Valkenburg; C.H.J. Van Den Brekel 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 590 KB

Strong or Weak Adsorption in the Case of

✍ Dr. H. Kuhne 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 210 KB 👁 1 views