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Deposition and properties of diamond thin films

✍ Scribed by Claus-Peter Klages


Book ID
108025598
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
491 KB
Volume
140
Category
Article
ISSN
0921-5093

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Structural and optical properties of dia
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In contrast with PECVD technology, reactive sputtering of graphite allows an independent control of the substrate bias. This characteristic permits the modification of film properties without varying the plasma composition. In the present study, the characteristics of DLC films grown by pulsed-DC re