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Deposition and processing of bismuth titanate thin films for direct wafer bonding

✍ Scribed by M. Alexe; D. Hesse; U. Gösele

Book ID: 114194403
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 662 KB
Volume: 55
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(98)00090-x

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