Deposition and microstructural characterization of MgO thin films by a spray pyrolysis method
β Scribed by Xie Yi; Wang Wenzhong; Qian Yitai; Yang Li; Chen Zhiwen
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 552 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0257-8972
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## Abstract Transparent dielectric thin films of MgO has been deposited on quartz substrates at different temperatures between 400 and 600Β°C by a pneumatic spray pyrolysis technique using Mg(CH~3~COO)~2~Β·4H~2~O as a single molecular precursor. The thermal behavior of the precursor magnesium acetate