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Deposition and electrostatic removal of gaseous organic contaminants on substrate surfaces

✍ Scribed by Angus Shiue; Der-Chi Tien; Walter Den; Shih-Cheng Hu; Chia-Shao Hsu

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 373 KB
Volume: 256
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2010.03.128

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