Deposition and characterization of Si-rich silicon oxide films using HMDS for integrated photonics

✍ Scribed by V.K. Tomar; D.K. Gautam

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 239 KB
• Volume: 10
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2007.11.005