Deposition and characterization of MAX-phase containing Ti–Si–C thin films by sputtering using elemental targets

✍ Scribed by Sonoda, Tsutomu; Nakao, Setsuo; Ikeyama, Masami

• Book ID: 122072316
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 495 KB
• Volume: 92
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/j.vacuum.2012.02.004