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Dependence of microstructure of TiN coatings on their thickness: V Valvoda et al, Thin Solid Films, 158, 1988, 225–232

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 161 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)91032-4

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Structure of TiN coatings deposited at r

Structure of TiN coatings deposited at relatively high rates and low temperatures by magnetron sputtering: V Valvoda et al,Thin Solid Films,156, 1988, 53–63

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 152 KB