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Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers

โœ Scribed by Mendeleyev, Vladimir Ya.


Book ID
115346658
Publisher
The Optical Society
Year
1997
Tongue
English
Weight
155 KB
Volume
36
Category
Article
ISSN
1559-128X

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Spectral analysis and computer simulation are adopted to investigate the tracing of a random profile with a mechanical profiler with a spherical tipped stylus. It is shown that the measuring error strongly depends on the ratio of the radius of stylus tip r to the rms roughness s and the ratio of the