Spectral analysis for the effect of styl
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Jiunn-Jong Wu
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Article
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1999
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Elsevier Science
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English
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Spectral analysis and computer simulation are adopted to investigate the tracing of a random profile with a mechanical profiler with a spherical tipped stylus. It is shown that the measuring error strongly depends on the ratio of the radius of stylus tip r to the rms roughness s and the ratio of the