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Spectral analysis for the effect of stylus tip curvature on measuring rough profiles

โœ Scribed by Jiunn-Jong Wu

Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
236 KB
Volume
230
Category
Article
ISSN
0043-1648

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โœฆ Synopsis

Spectral analysis and computer simulation are adopted to investigate the tracing of a random profile with a mechanical profiler with a spherical tipped stylus. It is shown that the measuring error strongly depends on the ratio of the radius of stylus tip r to the rms roughness s and the ratio of the 1re correlation distance b to the rms roughness s . By using the concept of critical wave number, spectral density of measured profile can be estimated. Also, formulas are developed to estimate the rms error and the critical sampling interval.

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