Dependence of interface states for ultra-thin SiO2/Si interfaces on the oxide atomic density determined from FTIR measurements

✍ Scribed by A Asano; T Kubota; Y Nishioka; H Kobayashi

• Book ID: 117219466
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 241 KB
• Volume: 427-428
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/s0039-6028(99)00268-x