Dependence of impurity incorporation upon substrate misorientation during GaAs growth by metalorganic vapour phase epitaxy

✍ Scribed by P.R. Hageman; J. te Nijenhuis; M.J. Anders; L.J. Giling

• Book ID: 108342234
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 411 KB
• Volume: 170
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/s0022-0248(96)00509-x