Degradation Mechanism in Si-Doped Al/Si Contacts and an Extremely Stable Metallization System

✍ Scribed by Mori, M.; Kanamori, S.; Ueki, T.

• Book ID: 117911464
• Publisher: IEEE
• Year: 1983
• Tongue: English
• Weight: 637 KB
• Volume: 6
• Category: Article
• ISSN: 0148-6411
• DOI: 10.1109/tchmt.1983.1136163