Defects in TiN and TiAIN coatings grown by combined cathodic arc/unbalanced magnetron technology

✍ Scribed by W-D Münz; DB Lewis; S Creasey; T Hurkmans; T Trinh; Wv Ijzendorn

• Book ID: 103471881
• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 894 KB
• Volume: 46
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(94)e0029-x