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Defect topography on GaAs wafers by microwave-detected photo-induced current transient spectroscopy

✍ Scribed by B. Gründig-Wendrock; J. R. Niklas

Book ID
104556398
Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
186 KB
Volume
0
Category
Article
ISSN
1862-6351

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Contactless electrical defect characteri
Contactless electrical defect characterization in semiconductors by microwave detected photo induced current transient spectroscopy (MD-PICTS) and microwave detected photoconductivity (MDP)
✍ Berger, Bastian ;Schüler, Nadine ;Anger, Sabrina ;Gründig-Wendrock, Bianca ;Nikl 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 725 KB

## Abstract The contactless electrical characterization techniques MDP and MD‐PICTS will be presented in this paper. Both methods are predestined for defect investigation in a variety of semiconductors. Due to a so far not reached sensitivity, major advantages of MDP are its high spatial resolution